| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the temperature in a vaporization chamber from excessively increasing at the vacuum suction after cleaning during a temporary stop period and before resuming supply, in a feeding device for a polymerizable monomer solution. <P>SOLUTION: In the supply mode (supply step) of a monomer feeding device 1, a polymerizable monomer solution is sent to a supply line 10 from a feed section 2, vaporized in a vaporization chamber 41, and supplied to a monomer utilization section 3. When the supply mode is temporarily stopped, a cleaning mode (cleaning step) is performed in which a cleaning liquid is passed from a feed section 4 to the supply line 10 and vaporized in the vaporization chamber 41. The flow rate of the cleaning liquid in the latter stage of the cleaning mode is made smaller than the flow rate of the cleaning liquid in the early stage of the cleaning mode. When the supply mode is resumed, the cleaning mode is switched to the supply step through a vacuum suction mode (vacuum suction step) in which a fluid in the supply line 10 is sucked. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
