| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device or the like capable of preventing degradation in accuracy of process using a focus position detection, even when a result of the focus position detection is deviated from an actual focus position. ! SOLUTION: An inspection device includes: a light receiving part which receives reflected light for detecting a focus position by using triangulation based on the reflected light obtained by irradiating an object with beam-like light; and a received light quantity determining part which determines abnormality in detection of the focus position when the received light quantity of the reflected light received by the light receiving part is less than a prescribed threshold. ! COPYRIGHT: (C)2015,JPO&INPIT |
