| 摘要 |
<p>An apparatus for inspecting display cells comprises: an inspection chamber to perform an inspection process to display cells formed on a substrate; a substrate stage having a plurality of vacuum holes arranged inside the inspection chamber and adsorbing the substrate to support the substrate to make the display cells side down; a first probe card arranged below the substrate stage and being in contact with first inspection pads arranged along a first side of the substrate to inspect the display cells; and a second probe card arranged below the substrate stage and being in contact with second inspection pads arranged along a second side of the substrate to inspect the display cells.</p> |
