发明名称 搬送機構体
摘要 <p>A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.</p>
申请公布号 JP5729570(B2) 申请公布日期 2015.06.03
申请号 JP20120523124 申请日期 2010.08.02
申请人 发明人
分类号 H01L21/677;B65G1/00;B65G1/04 主分类号 H01L21/677
代理机构 代理人
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