发明名称 磁気ヘッド及びその製造方法、及び磁気記録再生装置
摘要 <p>In a magnetic head of a high-frequency magnetic field assisted recording system, a width of a high-frequency magnetic field from an oscillator is decreased to enhance an oscillation frequency, in order to realize a high-density recording. An oscillator provided near a main pole, which generates a recording magnetic field, for generating a high-frequency magnetic field is patterned by a conventional photolithography, and then, an oxidation, nitridation, or oxynitridation is performed on the side face in a track width direction. With this process, an oxide layer, a nitride layer, or an oxynitride layer, which is made of a material of the oscillator, is formed on the side face of the oscillator in the track width direction, and the shape of the oscillator is formed to be semi-circular.</p>
申请公布号 JP5730226(B2) 申请公布日期 2015.06.03
申请号 JP20120037976 申请日期 2012.02.23
申请人 发明人
分类号 G11B5/31;G11B5/02;H01L21/8246;H01L27/105;H01L29/82;H01L43/08 主分类号 G11B5/31
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