发明名称 POWER SEMICONDUCTOR DEVICE
摘要 A power semiconductor device may include: an active region having a current flowing through a channel formed therein at the time of a turn-on operation of the power semiconductor device; a termination region formed in the vicinity of the active region; a plurality of first trenches formed lengthwise in one direction in the active region; and at least one or more second trenches formed lengthwise in one direction in the termination region. The second trench has a depth deeper than that of the first trench.
申请公布号 US2015144993(A1) 申请公布日期 2015.05.28
申请号 US201414292297 申请日期 2014.05.30
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 Um Kee Ju;Song In Hyuk;Park Jae Hoon;Jang Chang Su;Oh Ji Yeon
分类号 H01L29/06;H01L29/66;H01L29/739 主分类号 H01L29/06
代理机构 代理人
主权项 1. A power semiconductor device comprising: an active region having a current flowing through a channel in the active region at the time of a turn-on operation of the power semiconductor device; a termination region disposed in the vicinity of the active region; a plurality of first trenches extending lengthwise in one direction in the active region; and at least one or more second trenches extending lengthwise in one direction in the termination region, wherein the second trench has a depth deeper than that of the first trench.
地址 Suwon-Si KR
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