发明名称 |
POWER SEMICONDUCTOR DEVICE |
摘要 |
A power semiconductor device may include: an active region having a current flowing through a channel formed therein at the time of a turn-on operation of the power semiconductor device; a termination region formed in the vicinity of the active region; a plurality of first trenches formed lengthwise in one direction in the active region; and at least one or more second trenches formed lengthwise in one direction in the termination region. The second trench has a depth deeper than that of the first trench. |
申请公布号 |
US2015144993(A1) |
申请公布日期 |
2015.05.28 |
申请号 |
US201414292297 |
申请日期 |
2014.05.30 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
Um Kee Ju;Song In Hyuk;Park Jae Hoon;Jang Chang Su;Oh Ji Yeon |
分类号 |
H01L29/06;H01L29/66;H01L29/739 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
1. A power semiconductor device comprising:
an active region having a current flowing through a channel in the active region at the time of a turn-on operation of the power semiconductor device; a termination region disposed in the vicinity of the active region; a plurality of first trenches extending lengthwise in one direction in the active region; and at least one or more second trenches extending lengthwise in one direction in the termination region, wherein the second trench has a depth deeper than that of the first trench. |
地址 |
Suwon-Si KR |