Stress-inducing Structures, Methods, and Materials

摘要

Stress-inducing structures, methods, and materials are disclosed. In one embodiment, an isolation region includes an insulating material in a lower portion of a trench formed in a workpiece and a stress-inducing material disposed in a top portion of the trench over the insulating material.

主权项

1. An isolation structure comprising:
a trench disposed in a workpiece; a first insulating material disposed in a lower portion of the trench; a stress-inducing material disposed over the first insulating material; and a divot comprising a gutter-shaped depression disposed in the stress-inducing material.