| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a microscopic image having adaptive optical system correction to aberration induced by a sample and system.SOLUTION: A rear pupil of an optical system is segmented, and the segments are individually controlled by a wavefront modulation device 114; the direction and phase of individual beamlets of excitation or irradiation beams in the optical system are controlled to converge excitation light beams into a focal point 120 in the sample 106, and thereby scanning the focal point 120 at a plurality of different positions in the sample 106. When the focal points 120 are located at a plurality of different positions, the rays of emitted light emitted from the focal points 120 are detected to create an image of the sample. |
