| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electrode for an ion source, having good bondability between an electrode plate and a cooling pipe, high cooling efficiency, excellent corrosion resistance and a long life. <P>SOLUTION: This electrode for the ion source has an electrode body part 4 in which a plurality of thin plates 1, 2 having a plurality of beam extracting holes formed for extracting ion beams are bonded so as to be superimposed, a plurality of cooling pipes 3a, 3b, 3c made of a metal material different from that for the thin plates, while penetrating the electrode body part from one end part to the other end part and having extensions each extending from both ends of the electrode body part, and a pair of end plates 7 made of a material different from that for the thin plates and each mounted on both sides of the electrode body part so that the extensions of the cooling pipes penetrate the inside thereof, with the spaces between the end plates and the cooling pipes each seal-welded and with the thin plates joined to the cooling pipes by a hot hydrostatic pressure process to integrate them. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
