TUNABLE WAVELENGTH FILTER AND TUNABLE WAVELENGTH LASER MODULE WITH EMBEDDED THIN FILM METAL TEMPERATURE SENSOR

摘要

The present invention relates to a tunable wavelength filter with an embedded metal temperature sensor and a tunable wavelength laser module of external resonator type and, more specifically, to a tunable wavelength filter with an embedded metal temperature sensor and a tunable wavelength laser module of external resonator type which stabilize wavelength as accurate temperature measuring of an optical wave guide is possible by forming a meter temperature sensor using resistance change of a metal thin film depending on the temperature at a location on a contour line having the same temperature distribution as the optical waveguide in the process of manufacturing the optical waveguide with polymers.