SHEAR SENSOR ARRAY

摘要

The present disclosure relates to shear sensor arrays. In particular, the present disclosure relates to a floating element shear stress sensor array on a chip that is calibrated to high shear levels and is calibrated to determine the sensitivity to streamwise pressure gradients.

主权项

1. A micromachined floating element array sensor, comprising:
a solid support comprising at least one array of a plurality of floating shear sensors wherein said shear sensors detect shear stress and are calibrated to determine the sensitivity of said sensors to pressure gradients.