PRINTHEAD SUBSTRATE, METHOD OF MANUFACTURING THE SAME, PRINTHEAD, AND PRINTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a technique advantageous in preventing the short circuit of a wiring pattern while improving the electrothermal transduction efficiency of an electrothermal transducer element.SOLUTION: A method of manufacturing a printhead substrate comprises: forming a metal pattern including a part forming a pair of electrodes on an insulating member, while exposing a region in the insulating member on which a temperature detection element is to be formed; forming a conductive film which covers the insulating member and the metal pattern; forming a resist pattern which covers a first part of the conductive film on the region, and etching a second part except for the first part of the conductive film using the resist pattern; and etching the first part of the conductive film so as to form a temperature detection element which is connected to the part to become the pair of electrodes. In the steps, an amount of etching in the process of etching the second part is larger than a thickness of the conductive film, and an amount of etching in the etching process of etching the first part is smaller than the amount of etching in the etching process of etching the second part.