Polycrystalline Silicon Rod

摘要

A polycrystalline silicon rod is formed of polycrystalline silicon deposited radially around a silicon core line and is characterized by, in a cross-section that is a perpendicular cut in respect to the axial direction of a cylindrical rod, a ratio of surface area covered by coarse crystal particles having a diameter of 50 μm or greater is 20% or more of the crystal observed at the face, excluding the core line portion.

主权项

1. A polycrystalline silicon rod radically depositing a polycrystalline silicon around a silicon core wire, wherein
at a cross section face which is a perpendicular cut of a rod having a column shape against an axial direction, an area ratio of a coarse crystal particle having a long diameter of 50 μm or more is 20% or more among crystals observed at the face excluding the core wire part.