| 摘要 |
<p>A conveyance system (1) includes a storage case (12), a lifting/lowering apparatus (13), a handover apparatus (14), and a conveying apparatus (15). The lifting/lowering apparatus (13) lifts and lowers the storage case (12) to position each substrate (11) stored in the storage case (12) to a receiving position sequentially. The handover apparatus (14) receives the substrate (11) at the receiving position, and hand over the substrate (11) to the conveying apparatus (15) at a handover position. The conveying apparatus (15) includes a pair of belts (51, 51). The pair of belts (51, 51) is provided such that the belts are spaced apart from each other in a left-right direction. A plurality of profiles (54) associated with each other are provided on the pair of belts (51, 51), respectively. The profiles (54) associated with each other are configured to move together in a conveying direction, support outer edges of the substrate (11) handed over at the handover position, and position the substrate (11) to a prescribed position.</p> |
