发明名称 METHOD FOR PRODUCING A SUBSTRATE-PRODUCT SUBSTRATE COMBINATION
摘要 <p>The invention relates to a substrate for producing a substrate-product substrate combination by aligning, bringing into contact, and bonding a contact side of the large-area substrate to a support surface of a carrier substrate, whereby the substrate has a diameter d1, which can be reduced during back-thinning.</p>
申请公布号 EP2859581(A1) 申请公布日期 2015.04.15
申请号 EP20120730184 申请日期 2012.06.12
申请人 THALLNER, ERICH 发明人 THALLNER, ERICH
分类号 H01L21/67;H01L21/683 主分类号 H01L21/67
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