发明名称 |
Solid-state image sensing device and camera |
摘要 |
According to one embodiment, a solid-state image sensing device includes a semiconductor substrate having a first and second surface, an insulating film covering an element on the first surface, a pixel array including pixels configured to photoelectrically convert light applied on the side of the second surface, contact regions in the semiconductor substrate, one or more through-electrodes respectively provided in the contact regions, and first pads provided on the side of the second surface to correspond to the respective contact regions. The first pad extends in a first direction from the contact regions toward the pixel array. |
申请公布号 |
US9006807(B2) |
申请公布日期 |
2015.04.14 |
申请号 |
US201313848966 |
申请日期 |
2013.03.22 |
申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
Inoue Ikuko;Baba Masahiro;Sato Eiji;Kikuchi Haruhide |
分类号 |
H01L31/062;H01L31/0224;H01L31/0232;H01L27/146 |
主分类号 |
H01L31/062 |
代理机构 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
代理人 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
主权项 |
1. A solid-state image sensing device comprising:
a semiconductor substrate including a first surface and a second surface opposite to the first surface; an insulating film covering an element on the first surface; a pixel array which is provided in the semiconductor substrate and which includes pixels configured to photoelectrically convert light applied on the side of the second surface; a plurality of contact regions provided in the semiconductor substrate; one or more through-electrodes which are respectively provided in the contact regions and which are pierced from the first surface toward the second surface; and a plurality of first pads which are provided on the side of the second surface to correspond to the respective contact regions and which extend in a first direction from the contact regions toward the pixel array, wherein the first pads comprise a power supply pad to which a power supply voltage is applied, and a test pad to which a test signal is supplied, and a number of through-electrodes connected to the power supply pad is greater than a number of through-electrodes connected to the test pad. |
地址 |
Tokyo JP |