Micro-electro-mechanical system (MEMS) capacitive ohmic switch and design structures

摘要

A micro-electro-mechanical system (MEMS), methods of forming the MEMS and design structures are provided. The method includes forming a coplanar waveguide (CPW) comprising a signal electrode and a pair of electrodes on a substrate. The method includes forming a first sacrificial material over the CPW, and a wiring layer over the first sacrificial material and above the CPW. The method includes forming a second sacrificial material layer over the wiring layer, and forming insulator material about the first sacrificial material and the second sacrificial material. The method includes forming at least one vent hole in the insulator material to expose portions of the second sacrificial material, and removing the first and second sacrificial material through the vent hole to form a cavity structure about the wiring layer and which exposes the signal line and pair of electrodes below the wiring layer. The vent hole is sealed with sealing material.

主权项

1. A structure comprising:
a coplanar waveguide (CPW) comprising a signal line and ground lines formed on a substrate; a moveable plate provided over the CPW and facing the CPW; and a fixed plate provided between the CPW and the moveable plate, wherein the moveable plate is structured to move towards the fixed plate in an “on” state and remain in an original position in an “off” state, and
in the “on” state an input signal on the signal line shorts to the ground lines; andin the “off” state the input signal on the signal line passes though the moveable plate as an output signal.