发明名称 |
SILICA-MODIFIED-FLUORIDE BROAD ANGLE ANTI-REFLECTION COATINGS |
摘要 |
The disclosure is directed to a coating consisting of a binary metal fluoride coating consisting a high refractive index metal fluoride layer on top of a substrate, a low refractive index metal fluoride layer on top of the high refractive index layer and layer of SiO2 or F-SiO2 containing 0.2 wt % to 4.5 (2000 ppm to 45,000 ppm) F on top of the low refractive index layer. In one embodiment the F content of F-SiO2 is in the range of 5000 ppm to 10,000 ppm F. The high index and low index materials are each deposited to a thickness of less than or equal to 0.9 quarter wave, and the capping material is deposited to a thickness in the range of 5 nm to 25 nm. The disclosure is also directed to optical elements having the foregoing coating and a method of making the coating. |
申请公布号 |
EP2856263(A1) |
申请公布日期 |
2015.04.08 |
申请号 |
EP20130727501 |
申请日期 |
2013.05.29 |
申请人 |
CORNING INCORPORATED |
发明人 |
CANGEMI, MICHAEL JEROME;DEWA, PAUL GERARD;MALACH, JOSEPH D;MICHALOSKI, PAUL FRANCIS;SCHREIBER, HORST;WANG, JUE |
分类号 |
G03F7/20;G02B1/10 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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