发明名称 Anti-fuse array of semiconductor device and method for forming the same
摘要 An anti-fuse array of a semiconductor device and a method for forming the same are disclosed. The anti-fuse array for a semiconductor device includes a first-type semiconductor substrate formed to define an active region by a device isolation region, a second-type impurity implantation region formed in the active region, a first-type channel region isolated from the semiconductor substrate by the second-type impurity implantation region, a gate electrode formed over the channel region, and a first metal contact formed over the second-type impurity implantation region.
申请公布号 US9000560(B2) 申请公布日期 2015.04.07
申请号 US201313843282 申请日期 2013.03.15
申请人 SK Hynix Inc. 发明人 Sung Min Chul
分类号 H01L23/52;H01L23/525;H01L21/66;H01L27/112 主分类号 H01L23/52
代理机构 代理人
主权项 1. An anti-fuse array comprising: a first-type semiconductor substrate formed to define an active region by a device isolation region; a second-type impurity implantation region formed in the active region; a first-type channel region isolated from the semiconductor substrate by the impurity implantation region; a gate electrode formed over the channel region; and a first metal contact formed over the second-type impurity implantation region.
地址 Icheon KR