发明名称 METHODS AND APPARATUSES FOR FORMING MULTIPLE RADIO FREQUENCY (RF) COMPONENTS ASSOCIATED WITH DIFFERENT RF BANDS ON A CHIP
摘要 A method includes forming a first gate oxide in a first region and in a second region of a wafer. The method further includes performing first processing to form a second gate oxide in the second region. The second gate oxide has a different thickness than the first gate oxide. The method also includes forming first gate material of a first device in the first region and forming second gate material of a second device in the second region. The first device corresponds to a first radio frequency (RF) band and the second device corresponds to a second RF band that is different from the first RF band.
申请公布号 WO2015020786(A3) 申请公布日期 2015.04.02
申请号 WO2014US47548 申请日期 2014.07.22
申请人 QUALCOMM INCORPORATED 发明人 DUTTA, RANADEEP;YEAP, CHOH FEI
分类号 H01L21/8234;H01L27/088;H01L27/12 主分类号 H01L21/8234
代理机构 代理人
主权项
地址