CLEANING APPARATUS FOR VEHICLE FOR TRANSFERING WAFER AND CLEANING SYSTEM HAVING THE SAME

摘要

Provided is a cleaning apparatus for a vehicle for transferring a wafer and a cleaning system having the same. The cleaning apparatus includes a chamber which includes an interior space for receiving a vehicle for transferring a wafer, and a division plate of dividing the interior space into an upper region and a lower region; an injection unit which injects air to the vehicle in the interior space; and an absorption unit which has an upper pipe which having an inlet located in the upper region to be separated from the vehicle by the air injected from the injection unit to absorb a foreign material existing in the upper region.