| 摘要 |
PROBLEM TO BE SOLVED: To provide an accurate high-frequency oscillation type non-contact displacement sensor that does not include a defect of a conventional high-frequency oscillation type non-contact displacement sensor, has a simple configuration, has a small size, and is less apt to be affected by temperature fluctuation.SOLUTION: The non-contact displacement sensor detects the fact that displacement of an object causes variation of an oscillation state of a high-frequency oscillation circuit, or measures the amount of the variation. In the displacement sensor, the high-frequency oscillation circuit is integrally formed of a planar coil formed on a printed wiring board and an electronic component mounted on the printed wiring board. |
