发明名称 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 This technology relates to a nonvolatile memory device and a method for fabricating the same. The nonvolatile memory device may include a pipe connection gate electrode configured to have a lower part buried in a groove formed in a substrate, one or more pipe channel layers formed within the pipe connection gate electrode, pairs of main channel layers each coupled with the pipe channel layer and extended in a direction substantially perpendicular to the substrate; and a plurality of interlayer insulating layers and a plurality of cell gate electrodes alternately stacked along the main channel layers. In accordance with this technology, a lower part of the pipe connection gate electrode is buried in the substrate. Accordingly, electric resistance may be reduced because the pipe connection gate electrode may have an increased volume without a substantial increase of the height.
申请公布号 US2015079748(A1) 申请公布日期 2015.03.19
申请号 US201414550411 申请日期 2014.11.21
申请人 SK hynix Inc. 发明人 KIM Min-Soo;LEE Young-Jin;WHANG Sung-Jin
分类号 H01L27/115;H01L21/3213 主分类号 H01L27/115
代理机构 代理人
主权项
地址 Gyeonggi-do KR