发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve the reliability of a semiconductor device in a manufacturing method of the semiconductor device.SOLUTION: A manufacturing method of a semiconductor device includes the steps of: heating a solder bump 23, which connects an electrode 24 of a circuit board 21 with a semiconductor element 32 and contains tin, to a temperature lower than a melting point of the solder bump 23; and removing the semiconductor element 32 from the circuit board 21 after the step where the solder bump 23 is heated.
申请公布号 JP2015053434(A) 申请公布日期 2015.03.19
申请号 JP20130186286 申请日期 2013.09.09
申请人 FUJITSU LTD 发明人 OKAMOTO KEISHIRO;SAKUYAMA SEIKI
分类号 H01L21/60 主分类号 H01L21/60
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