发明名称 |
DEVICE FOR PRODUCING AN ELECTRON BEAM |
摘要 |
<p>Device for producing an electron beam includes a housing, which delimits a space that is evacuatable and has an electron beam outlet opening; an inlet structured and arranged for feeding process gas into the space; and a planar cathode and an anode, which are arranged in the space, and between which, a glow discharge plasma is producible by an applied electrical voltage. Ions are accelerateable from the glow discharge plasma onto a surface of the cathode and electrons emitted by the cathode are accelerateable into the glow discharge plasma. The cathode includes a first part made of a first material at least on an emission side, which forms a centrally arranged first surface region of the cathode, and a second part made of a second material, which forms a second surface region of the cathode that encloses the first surface region.</p> |
申请公布号 |
EP2633543(B1) |
申请公布日期 |
2015.03.18 |
申请号 |
EP20110764469 |
申请日期 |
2011.09.08 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
MATTAUSCH, GÖSTA;FEINÄUGLE, PETER;KIRCHHOFF, VOLKER;WEISKE, DIETER;FLASKE, HENRIK;ZEIBE, RAINER |
分类号 |
H01J3/02;H01J37/075;H01J37/077 |
主分类号 |
H01J3/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|