| 摘要 |
PROBLEM TO BE SOLVED: To provide a load port capable of mounting a different kind of wafer cassettes and capable of mapping a semiconductor wafer housed inside, with no special reforming.SOLUTION: A second wafer cassette can be mounted on a stage for mounting a first wafer cassette via a cassette adaptor. From the information of a detection switch which the cassette adaptor includes, a kind of a wafer cassette is identified. By operating a mapping sensor which matches with a kind of the cassette adaptor, mapping information of a semiconductor wafer is obtained. |
