METHOD OF MANUFACTURING LAMINATE AND LAMINATE

摘要

PROBLEM TO BE SOLVED: To provide a laminate having a separation layer in which a substrate to be laminated can be up-sized.SOLUTION: A method of manufacturing a laminate 21 including a substrate 11, a light transmitting support plate 12 for supporting the substrate 11, and a first separation layer 15 provided between the substrate 11 and support plate 12 and is altered by absorbing the light irradiated via the support plate 12 includes a separation layer formation step for forming the first separation layer 15 by performing plasma processing using a reaction gas containing an organic compound having an unsaturated bond and a fluoride compound.