CONTINUOUS DIFFUSION PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a continuous diffusion processing apparatus that can suppress generation of powder dust imparting adverse effect on processing quality of a target object when the target object is fed.SOLUTION: A continuous diffusion processing apparatus comprises: a feeding table 50 on which a plurality of plate-like processing targets is mounted; a barrel-type heating furnace 1 extending linearly from a feed-in portion for feeding in the feeding table 50 to a feed-out portion for feeding out the feeding table 50; a feeding device 2 for successively feeding the feeding table 50 into the heating furnace 1 and successively feeding out the feeding table 50 fed in the heating furnace 1; a heating device 3 for heating the processing targets mounted on the feeding table 50 passing through the heating furnace 1; and a gas supply device 41 for supplying gas into the heating furnace 1 for diffusion processing. The feeding table 50 comprises a wheel portion rolling along a bottom surface of the heating furnace 1 by a rolling bearing.