发明名称 DEPOSITION DEVICE AND DEPOSITION METHOD
摘要 A deposition device (100) that deposits material particles (P) includes an ionization section (20) that ionizes the material particles (P) utilizing a photoelectric effect in a reaction chamber to which the material particles (P) are supplied, and an electrode section (32, 34) that guides the ionized material particles (P) to a given area utilizing a Coulomb force.
申请公布号 EP2840163(A4) 申请公布日期 2015.03.11
申请号 EP20130819352 申请日期 2013.05.21
申请人 LABOTEC LIMITED 发明人 NAKANO, HIROFUMI
分类号 C23C14/32;H01J37/32 主分类号 C23C14/32
代理机构 代理人
主权项
地址