发明名称 OPTICAL COMPONENT
摘要 The invention relates to an optical component (40) comprising at least one micro-opto-electro-mechanical system (MOEMS) (73) having a front side and a rear side, and at least one printed circuit board (56), wherein the at least one printed circuit board (56) is arranged on the rear side of the at least one MOEMS (73), wherein the at least one printed circuit board (56) has lateral contacts (67) and can be fitted with electronic components and cooling elements, and wherein the at least one MOEMS (73) protrudes laterally beyond the at least one printed circuit board (56).
申请公布号 WO2015028450(A1) 申请公布日期 2015.03.05
申请号 WO2014EP68040 申请日期 2014.08.26
申请人 CARL ZEISS SMT GMBH 发明人 HOLZ, MARKUS;SIGEL, BENJAMIN;HORN, JAN;KNAUF, BENEDIKT;ZIMMER, FABIAN
分类号 B81B7/00 主分类号 B81B7/00
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