发明名称 |
METHOD FOR PRODUCING MOLD FOR TRANSFERRING FINE PATTERN, METHOD FOR PRODUCING SUBSTRATE HAVING UNEVEN STRUCTURE USING SAME, AND METHOD FOR PRODUCING ORGANIC EL ELEMENT HAVING SAID SUBSTRATE HAVING UNEVEN STRUCTURE |
摘要 |
A mold for transferring a fine pattern, suitable for producing a substrate having a concave-convex structure such as a diffraction grating, can be provided by a simple process and with a high throughput. A method for producing a mold for transferring a fine pattern includes: a step of coating a surface of a base member with a solution containing a block copolymer and polyalkylene oxide; a solvent phase-separation step of phase-separating the block copolymer under a presence of vapor of an organic solvent so as to obtain a block copolymer film of the block copolymer, the block copolymer film having a concave-convex structure on a surface thereof and a horizontal cylinder structure in an interior thereof; a step of stacking a metal layer by electroforming; and a step of releasing the base member having the concave-convex structure formed thereon from the metal layer. |
申请公布号 |
EP2842721(A1) |
申请公布日期 |
2015.03.04 |
申请号 |
EP20130781178 |
申请日期 |
2013.03.19 |
申请人 |
JX NIPPON OIL & ENERGY CORPORATION |
发明人 |
SEKI, TAKASHI;MASUYAMA, SATOSHI;FUKUDA, MAKI;NISHIMURA, SUZUSHI |
分类号 |
B29C59/02;B29C33/38;B29C33/42;B29C45/26;B29K105/00;B29L11/00;B82Y10/00;B82Y40/00;C25D1/10;G03F7/00;G03F7/16;H01L21/027;H01L51/50;H01L51/52;H05B33/02;H05B33/10 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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