| 摘要 |
PROBLEM TO BE SOLVED: To provide a long-life ceramic heater having a three-dimentional shape that is used for heating a material crucible of a vacuum evaporation device.SOLUTION: A ceramic heater comprises: a supporting base material having a three-dimentional shape and consisting of an electrically insulating ceramic; a thin-film heating element provided on the supporting base material, consisting of a conductive ceramic, and on which a heater pattern including a folded part is formed; an insulating layer provided on the heating element, and consisting of an electrically insulating ceramic; and a power supply terminal for connecting the heating element with the power supply. The folded part of the heater pattern is divided into N current paths in a direction that a current flows, and a power density Xn of a certain n-th current path is so uniform as within a range of ±30% of an average value of the entire power density. |
