| 发明名称 |
THIN FILM DEPOSITION APPARATUS AND THIN FILM DEPOSITION METHOD USING THE SAME |
| 摘要 |
A thin film deposition apparatus includes a mask in contact with a first surface of a substrate, a magnet plate above a second surface of the substrate and configured to pull the mask toward the first surface of the substrate, the second surface being an opposite surface to the first surface, and an insulating member between the magnet plate and the second surface of the substrate. |
| 申请公布号 |
US2015056370(A1) |
申请公布日期 |
2015.02.26 |
| 申请号 |
US201414217188 |
申请日期 |
2014.03.17 |
| 申请人 |
Samsung Display Co., Ltd. |
发明人 |
Lee Jae-Cheol |
| 分类号 |
H01L51/56 |
主分类号 |
H01L51/56 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A thin film deposition apparatus comprising:
a mask in contact with a first surface of a substrate; a magnet plate above a second surface of the substrate and configured to pull the mask toward the first surface of the substrate, the second surface of the substrate being an opposite surface to the first surface; and an insulating member between the magnet plate and the second surface of the substrate. |
| 地址 |
Yongin-City KR |
