| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing method capable of preventing a substrate from being broken.SOLUTION: The polishing method inspects whether a peripheral part of a substrate has an abnormal portion. When an abnormal portion is detected, the substrate is polished. When an abnormal portion is not detected, the substrate is not polished. One example of an abnormal portion of the substrate is a foreign matter such as adhesive adhering to a peripheral part of the substrate. After polishing the substrate, whether a peripheral part of the substrate has an abnormal portion may be inspected again. |
