CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM DRAWING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a device capable of performing correction calculation even for a fogging effect in a case where a dose modulation amount including a proximity effect correction amount is inputted from the device exterior.SOLUTION: A drawing apparatus 100 comprises: an area density calculation unit 12 calculating an area density of a pattern weighted by using a dose modulation amount that takes a correction amount preliminarily inputted from the exterior and used for correcting dimensional variation caused by a proximity effect into account; a fogging correction irradiation amount coefficient calculation unit 14 calculating a fogging correction irradiation amount coefficient for correcting dimensional variation caused by the fogging effect by using the area density of the pattern weighted by using the dose modulation amount inputted from the exterior; an irradiation amount calculation unit 113 calculating an irradiation amount of a charged particle beam by using the fogging correction irradiation amount coefficient and the dose modulation amount; and a drawing unit 150 drawing a pattern on a sample by using the charged particle beam of the irradiation amount.