| 摘要 |
<p>A charged-particle beam irradiation device, which irradiates an object to be irradiated with a charged-particle beam, includes a scanning member that scans the object to be irradiated with the charged-particle beam; an irradiation amount setting unit that sets an irradiation amount of the charged-particle beam at a plurality of target scanning positions on a scanning line of the charged-particle beam with which the scanning member scans the object to be irradiated; and a scanning speed setting unit that sets a target scanning speed of the charged-particle beam at each of the target scanning positions on the basis of the irradiation amount set by the irradiation amount setting unit.</p> |
