Optical bus in 3D integrated circuit stack

摘要

An optical bus (130) of an integrated circuit (100) comprises: a polymer waveguide (112), a micromirror (114, 116), and an optical coupler (120). The polymer waveguide (112) is disposed in a via (110) formed through at least one die layer (102, 104, 106) of the integrated circuit (100) comprising an active circuit (210). The micromirror (114) is disposed adjacent to the via (110) and optically coupled to the polymer waveguide (112). The optical coupler (120) is connected to the polymer waveguide (112) to couple the active circuit (210) to the optical bus (130). A stacked integrated circuit (100) is described comprising such an optical bus (130). A method (800) of fabricating a rear 45° micromirror on a silicon substrate that can be used in the optical bus (130) is also described. Furthermore, alignment/lock mechanisms for use in a stacked integrated circuit comprising first and second silicon substrates are described.

主权项

1. An optical bus of an integrated circuit, comprising:
a polymer waveguide disposed in a via formed through at least one die layer of said integrated circuit, said die layer comprising an active circuit; a micromirror disposed adjacent said via and optically coupled to said polymer waveguide in said via; and an optical coupler connected to said polymer waveguide of said via for coupling said active circuit of said die layer to said optical bus.