| 主权项 |
1. A robot assembly for transporting a substrate, comprising:
a first arm and a second arm supported by a column; the first arm further comprising a first limb, the first limb comprising a first set of revolute joint/link pairs configured to provide translation and rotation of a pair of distal most links of the first limb in a horizontal plane; the second arm further comprising a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a pair of distal most links of the second limb in a horizontal plane; the first limb and the second limb having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing; an actuator assembly coupled to the first set of revolute joint/link pairs and to the second set of revolute joint/link pairs to effect rotation and translation of the pair of distal most links of the first limb and the second limb, where the actuator assembly includes coaxial motors having a linearly reduced height compared to an actuator assembly having a same number of coaxial motors, the coaxial motors being linearly stacked one above the other along a vertical axis at different levels where the different levels of the coaxial motors are less than an independent number of degrees of freedom defined by the coaxial motors and the actuator assembly is disposed within a semiconductor processing tool relative to the first and second arms so that the first and second arms are disposed at a predetermined standard height above the floor; each of the first limb and the second limb defining, in conjunction with the actuator assembly, at least three degrees of freedom per limb such that the at least three degrees of freedom of the first limb are effected independent of the at least three degrees of freedom of the second limb, whereby each distal link of the pair of distal most links of the first limb and the second limb are independently horizontally translatable for extension and retraction. |
