CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING CHAMBER

摘要

A charged particle beam drawing apparatus according to the embodiment of the present invention includes a stage which supports a specimen as a drawing target and an airtight drawing chamber which is formed with a box shape with a sidewall and a bottom plate and receives the stage. The bottom plate includes a plurality of support units which are connected to the sidewall and support the stage and a curved part which is connected to the support unit and has a convex shape to be curved outward.