| 发明名称 |
SUBSTRATE MANUFACTURING METHOD AND ELECTRONIC DEVICE MANUFACTURING METHOD |
| 摘要 |
Disclosed is a substrate manufacturing method that includes: a step for polishing a surface of a material substrate; and a step for forming a planarization film on the surface of the material substrate after polishing the surface of the material substrate. |
| 申请公布号 |
WO2015008586(A1) |
申请公布日期 |
2015.01.22 |
| 申请号 |
WO2014JP66633 |
申请日期 |
2014.06.24 |
| 申请人 |
SONY CORPORATION |
发明人 |
AKASAKA, SHIN;KUMON, SATOSHI;SATOU, KENTAROU;OISHI, YUKI |
| 分类号 |
G09F9/00;B24B37/00;G09F9/30 |
主分类号 |
G09F9/00 |
| 代理机构 |
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代理人 |
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