| 摘要 |
<p>A ferroelectric film (40) having a columnar structure constituted by a plurality of columnar grains, and containing as a main component a perovskite oxide which has a composition expressed by a compositional formula A 1+´ [(Zr x Ti 1-x ) 1-y M y ]O z , where A represents one or more A-site elements including lead (Pb) as a main component, M represents one or more of vanadium (V), niobium (Nb), tantalum (Ta), and antimony (Sb) as one or more B-site elements, zirconium (Zr) and titanium (Ti) are also B-site elements, 0 < x ‰¤ 0.7, 0.1 ‰¤ y ‰¤ 0.4, ´ is approximately zero, z is approximately 3, and ´ and z may deviate from 0 and 3, respectively, within ranges of ´ and z in which the composition expressed by the compositional formula A 1+´ [(Zr x Ti 1-x ) 1-y M y ]O z can substantially form a perovskite structure.</p> |
