| 摘要 |
<P>PROBLEM TO BE SOLVED: To absorb vibration in a direction crossing the expansion/contraction direction of a bellows. <P>SOLUTION: A bellows mechanism 10 includes: a bellows 101 positioned between a vacuum chamber 408 and a storage casing 422 accommodated in the vacuum chamber; a flange 102 connecting the vacuum chamber with the bellows; a thin wall part 115 formed between a pair of slits 114 penetrating the flange along the expansion/contraction direction of the bellows, and allowing the vacuum chamber to vibrate in a direction crossing the expansion/contraction direction of the bellows; and a rubber sheet 107 for shielding the inside and the outside of the vacuum chamber by closing the open ends of the slits. The bellows absorbs the vibration of a pressure chamber in the expansion/contraction direction of the bellows, and the thin wall part absorbs the vibration of the pressure chamber in a direction crossing the expansion/contraction direction of the bellows. <P>COPYRIGHT: (C)2012,JPO&INPIT |
