Device for calorimetric measurement

摘要

In one aspect, provided herein is a single crystal silicon microcalorimeter, for example useful for high temperature operation and long-term stability of calorimetric measurements. Microcalorimeters described herein include microcalorimeter embodiments having a suspended structure and comprising single crystal silicon. Also provided herein are methods for making calorimetric measurements, for example, on small quantities of materials or for determining the energy content of combustible material having an unknown composition.

主权项

1. A microcalorimeter comprising a single crystal silicon suspended structure supported by one or more single crystal silicon tethers, wherein the single crystal silicon suspended structure comprises a heater-thermometer, wherein the heater-thermometer comprises a region of doped single crystal silicon within the single crystal silicon suspended structure, wherein the single crystal silicon suspended structure and heater-thermometer comprise a unitary structure and wherein the heater-thermometer provides both heating and temperature sensing in a single element comprising said region of doped single crystal silicon.