| 摘要 |
<p>The present invention relates to a method for inspecting an ITO pattern of a touch-screen panel using a microscope, comprising the steps of: preparing a sample having an ITO pattern formed on a transparent substrate; irradiating light having a wavelength of 200 to 450 nm to the sample; photographing the sample using an imaging device having the wavelength range of the light; and generating image data including the ITO pattern based on the output signals of the imaging device. The present invention can easily judge whether or not the transparent ITO pattern is normally formed, and can reduce time for inspecting an electrode pattern greatly because the transparent ITO pattern sharpens as contrast between the transparent glass substrate and the transparent ITO pattern in the microscopic image is maximized.</p> |
