Root cause distribution determination based on layout aware scan diagnosis results

摘要

Aspects of the invention relate to yield analysis techniques for generating root cause distribution information. Suspect information for a plurality of failing dies is first generated using a layout-aware diagnosis method. Based on the suspect information, potential root causes for the plurality of failing dies, and suspect feature weights and total feature weights for each of the potential root causes may then be determined. Next, the probability information of observing a particular suspect that is related to a particular root cause may be extracted. Finally, an expectation-maximization analysis may be conducted for generating the root cause distribution information based on the probability information and the suspect information. Heuristic information may be used to prevent the analysis from over-fitting.

主权项

1. A method of yield analysis, comprising:
receiving failure files for a plurality of failing dies, and corresponding test patterns and circuit design information, the circuit design information comprising logic and layout information; performing a layout-aware diagnosis based on the failure files, the test patterns and the circuit design information to derive suspect information for the plurality of failing dies, the suspect information comprising a plurality of suspects; determining potential root causes for the plurality of failing dies based on the suspect information; determining suspect feature weights and total feature weights for each of the potential root causes; generating probability information of observing a particular suspect that is related to a particular root cause based on the suspect feature weights, the total feature weights, the suspect information and the circuit design information; and generating root cause distribution information based on the probability information and the suspect information.