发明名称 |
MOBILE BODY DRIVE SYSTEM AND MOBILE BODY DRIVE METHOD, PATTERN FORMATION APPARATUS AND METHOD, EXPOSURE APPARATUS AND METHOD, DEVICE MANUFACTURING METHOD, AND DECISION METHOD |
摘要 |
A drive device drives a wafer table in a Y-axis direction based on a measurement value of an encoder that measures position information of the wafer table (WTB) in the Y-axis direction and based on known correction information in accordance with position information of the wafer table (WTB) in non-measurement directions (e.g. Z, ¸z and ¸x directions) that are measured by interferometers (16, 43A are 43B) at the time of the measurement by the encoder. That is, the wafer table (a movable body) is driven in the Y-axis direction based on the measurement value of the encoder that has been corrected by correction information for correcting a measurement error of the encoder that is caused by a relative displacement of a head and a scale in the non-measurement direction. Accordingly, the movable body can be driven with high accuracy in a desired direction while measuring the position by the encoder, without being affected by the relative motion between the head and the scale in directions other than a direction to be measured (measurement direction). |
申请公布号 |
KR101479347(B1) |
申请公布日期 |
2015.01.05 |
申请号 |
KR20087026014 |
申请日期 |
2007.08.31 |
申请人 |
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发明人 |
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分类号 |
G03F7/20;G03F9/00;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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