MANUFACTURING METHOD OF ELECTRO-OPTIC DEVICE SUBSTRATE, ELECTRO-OPTIC DEVICE SUBSTRATE, ELECTRO-OPTIC DEVICE, AND ELECTRONIC DEVICE

摘要

A manufacturing method of a microlens array substrate, which is a manufacturing method of electro-optic device substrate, includes a step of forming concave portions, each of which corresponds to each of a plurality of pixels, by etching a first surface of a light transmitting substrate, a step of forming a lens layer including microlenses formed by filling at least the concave portions with a lens material having a refractive index greater than that of the substrate, a step of flattening a second surface of the lens layer opposite to a surface in which the microlenses are formed, a step of forming a light shielding film that surrounds a display area, in which each of the plurality of pixels is arranged, on the flattened second surface, and a step of forming a light transmitting path layer that covers the second surface on which the light shielding film is formed.

主权项

1. A manufacturing method of electro-optic device substrate, comprising:
forming a concave portion, which corresponds to a pixel, by etching a first surface of a light transmitting substrate; forming a lens layer including a microlens formed by filling the concave portion with a lens material having a refractive index greater than that of the substrate; flattening a second surface of the lens layer opposite to a surface in which the microlens are formed; forming a light shielding film that surrounds a display area, in which the pixel is arranged, on the flattened second surface; and forming a light transmitting path layer that covers the second surface on which the light shielding film is formed.