| 发明名称 |
ULTRASONIC CLEANING DEVICE SOCKET |
| 摘要 |
<p>The present invention relates to an ultrasonic cleaning module socket. The purpose of the present invention is to easily replace various ultrasonic cleaning modules, thereby changing and applying ultrasonic vibration suitable for each ultrasonic cleaning module.</p> |
| 申请公布号 |
KR101472791(B1) |
申请公布日期 |
2014.12.15 |
| 申请号 |
KR20130086611 |
申请日期 |
2013.07.23 |
| 申请人 |
KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
KIM, HYUN SE;LEE, YANG LAE;LIM, EEI SU |
| 分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
| 代理机构 |
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代理人 |
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| 主权项 |
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