发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a semiconductor device that allows improving ESD resistance and sensitivity to temperatures, and to provide a method of manufacturing the same.SOLUTION: An oxide film 16 is formed on a surface of a semiconductor substrate 1. A temperature-sensing diode 17 is formed on the oxide film 16. A trench 25 extending from the surface to the inside of the semiconductor substrate 1 is formed. A trench electrode 27 is buried in the trench 25 via an oxide film 26. The trench electrode 27 is connected to the temperature-sensing diode 17.</p>
申请公布号 JP2014232803(A) 申请公布日期 2014.12.11
申请号 JP20130113124 申请日期 2013.05.29
申请人 MITSUBISHI ELECTRIC CORP 发明人 FUJII HIDENORI
分类号 H01L27/04;G01K1/18;G01K7/01;H01L21/822;H01L21/8234;H01L27/06;H01L29/739;H01L29/78;H01L29/86 主分类号 H01L27/04
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