METHOD, COMPUTER SYSTEM AND APPARATUS FOR RECIPE GENERATION FOR AUTOMATED INSPECTION SEMICONDUCTOR DEVICES

摘要

A method, a computer system and an apparatus are disclosed for inspection recipe generation for the automated inspection of semiconductor devices. In order to generate the inspection recipe a reference data set is used. Automatic inspection is carried out with an initial recipe on images of dies of the reference data set (reference wafermap). The detected inspection results from the automatic inspection are classified and the classified inspection results are compared with an expert classification of defects in dies. Overkill and underkill numbers are automatically generated. According to the overkill and underkill numbers the inspection recipe parameters are modified. Automatic inspection is repeated if the detection and/or the classification are below a predefined threshold.